Chemically amplified positive resist composition and resist pattern forming process

ABSTRACT

A positive resist composition comprising a polymer adapted to be decomposed under the action of acid to increase its solubility in alkaline developer and a sulfonium compound of formula (A) has a high resolution. When the resist composition is processed by lithography, a pattern with minimal LER can be formed.

CROSS-REFERENCE TO RELATED APPLICATION

This non-provisional application claims priority under 35 U.S.C. § 119(a) on Patent Application No. 2016-255018 filed in Japan on Dec. 28, 2016, the entire contents of which are hereby incorporated by reference.

TECHNICAL FIELD

This invention relates to a chemically amplified positive resist composition and a resist pattern forming process using the same.

BACKGROUND ART

To meet the recent demand for higher integration in integrated circuits, pattern formation to a finer feature size is required. Acid-catalyzed chemically amplified resist compositions are most often used in forming resist patterns with a feature size of 0.2 μm or less. High-energy radiation such as UV, deep-UV or electron beam (EB) is used as the light source for exposure of these resist compositions. In particular, while EB lithography is utilized as the ultra-fine microfabrication technique, it is also indispensable in processing a photomask blank to form a photomask for use in semiconductor device fabrication.

Polymers comprising a major proportion of aromatic structure having an acidic side chain, for example, polyhydroxystyrene have been widely used in resist materials for the KrF excimer laser lithography. These polymers are not used in resist materials for the ArF excimer laser lithography since they exhibit strong absorption at a wavelength of around 200 nm. These polymers, however, are expected to form useful resist materials for the EB and EUV lithography for forming patterns of finer size than the processing limit of ArF excimer laser because they offer high etching resistance.

Often used as the base polymer in positive resist compositions for EB and EUV lithography is a polymer having an acidic functional group on phenol side chain masked with an acid labile protective group. Upon exposure to high-energy radiation, the acid labile protective group is deprotected by the catalysis of an acid generated from a photoacid generator so that the polymer may turn soluble in alkaline developer. Typical of the acid labile protective group are tertiary alkyl, tert-butoxycarbonyl, and acetal groups. The use of protective groups requiring a relatively low level of activation energy for deprotection such as acetal groups offers the advantage that a resist film having a high sensitivity is obtainable. However, if the diffusion of generated acid is not fully controlled, deprotection reaction can occur even in the unexposed region of the resist film, giving rise to problems like degradation of line edge roughness (LER) and a lowering of in-plane uniformity of pattern line width (CDU).

Attempts were made to ameliorate resist sensitivity and pattern profile in a controlled way by properly selecting and combining components used in resist compositions and adjusting processing conditions. One outstanding problem is the diffusion of acid. Since acid diffusion has a material impact on the sensitivity and resolution of a chemically amplified resist composition, many studies are made on the acid diffusion problem.

Patent Documents 1 and 2 describe photoacid generators capable of generating bulky acids like benzenesulfonic acid upon exposure, for thereby controlling acid diffusion and reducing roughness. Since these acid generators are still insufficient in controlling acid diffusion, it is desired to have an acid generator with more controlled diffusion.

Patent Document 3 proposes to control acid diffusion in a resist composition by binding an acid generator capable of generating a sulfonic acid upon light exposure to a base polymer. This approach of controlling acid diffusion by binding recurring units capable of generating acid upon exposure to a base polymer is effective in forming a pattern with reduced LER. However, a problem arises with respect to the solubility in organic solvent of the base polymer having bound therein recurring units capable of generating acid upon exposure, depending on the structure and proportion of the bound units.

Patent Document 4 describes a resist composition comprising a polymer comprising recurring units having an acetal group and a sulfonium salt capable of generating an acid having a high acid strength such as fluoroalkanesulfonic acid. Regrettably, the pattern obtained therefrom has noticeable LER. This is because the acid strength of fluoroalkanesulfonic acid is too high for the deprotection of an acetal group requiring a relatively low level of activation energy for deprotection. So, even if acid diffusion is controlled, deprotection reaction can occur in the unexposed region with a minor amount of acid that has diffused thereto. The problem arises commonly with sulfonium salts capable of generating benzenesulfonic acids as described in Patent Documents 1 and 2. It is thus desired to have an acid generator capable of generating an acid having an appropriate strength to deprotect an acetal group.

While the aforementioned methodology of generating a bulky acid is effective for suppressing acid diffusion, the methodology of tailoring an acid diffusion inhibitor (also known as quencher) is also considered effective.

The acid diffusion inhibitor is, in fact, essential for controlling acid diffusion and improving resist performance. Studies have been made on the acid diffusion inhibitor while amines and weak acid onium salts have been generally used. The weak acid onium salts are exemplified in several patent documents. Patent Document 5 describes that the addition of triphenylsulfonium acetate ensures to form a satisfactory resist pattern without T-top profile, a difference in line width between isolated and grouped patterns, and standing waves. Patent Document 6 reports improvements in sensitivity, resolution and exposure margin by the addition of sulfonic acid ammonium salts or carboxylic acid ammonium salts. Also, Patent Document 7 describes that a resist composition for KrF or EB lithography comprising a PAG capable of generating a fluorinated carboxylic acid is improved in resolution and process latitude such as exposure margin and depth of focus. These compositions are used in the KrF, EB and F₂ lithography. Patent Document 8 describes a positive photosensitive composition for ArF excimer laser comprising a carboxylic acid onium salt. These systems are based on the mechanism that a salt exchange occurs between a weak acid onium salt and a strong acid (sulfonic acid) generated by another PAG upon exposure, to form a weak acid and a strong acid onium salt. That is, the strong acid (sulfonic acid) having high acidity is replaced by a weak acid (carboxylic acid), thereby suppressing acid-catalyzed decomposition reaction of acid labile group and reducing or controlling the distance of acid diffusion. The onium salt apparently functions as an acid diffusion inhibitor.

However, noticeable LER is still a problem in the recent progress of miniaturization when a resist composition comprising the foregoing carboxylic acid onium salt or fluorocarboxylic acid onium salt is used in pattering. It would be desirable to have an acid diffusion inhibitor capable of minimizing LER.

CITATION LIST

-   Patent Document 1: JP-A 2009-053518 -   Patent Document 2: JP-A 2010-100604 -   Patent Document 3: JP-A 2011-022564 -   Patent Document 4: JP 5083528 -   Patent Document 5: JP 3955384 (U.S. Pat. No. 6,479,210) -   Patent Document 6: JP-A H11-327143 -   Patent Document 7: JP 4231622 (U.S. Pat. No. 6,485,883) -   Patent Document 8: JP 4226803 (U.S. Pat. No. 6,492,091) -   Patent Document 9: JP 4575479

DISCLOSURE OF INVENTION

An object of the invention is to provide a positive resist composition which exhibits a high resolution and can form a pattern with a minimal LER, and a resist pattern forming process.

The inventors have found that when a sulfonium compound of specific structure is formulated in a resist composition, the resist composition exhibits a high resolution and forms a pattern of good profile with a minimal LER.

In one aspect, the invention provides a positive resist composition comprising (A) a sulfonium compound having the formula (A) and (B) a base polymer containing a polymer comprising recurring units having the formula (B1), adapted to be decomposed under the action of acid to increase its solubility in alkaline developer.

Herein R¹, R², and R³ are each independently a C₁-C₂₀ straight, branched or cyclic monovalent hydrocarbon group which may contain a heteroatom, p and q are each independently an integer of 0 to 5, r is an integer of 0 to 4, in case of p=2 to 5, two adjoining groups R¹ may bond together to form a ring with the carbon atoms to which they are attached, in case of q=2 to 5, two adjoining groups R² may bond together to form a ring with the carbon atoms to which they are attached, in case of r=2 to 4, two adjoining groups R³ may bond together to form a ring with the carbon atoms to which they are attached.

Herein R^(A) is hydrogen, fluorine, methyl or trifluoromethyl, R₁₁ is each independently halogen, an optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₆ straight, branched or cyclic alkyl group, or optionally halogenated C₁-C₆ straight, branched or cyclic alkoxy group, A¹ is a single bond or C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, v is 0 or 1, w is an integer of 0 to 2, a is an integer satisfying 0≤a≤5+2w−b, and b is an integer of 1 to 3.

In a preferred embodiment, the polymer further comprises recurring units having the formula (B2):

wherein R^(A) is as defined above, R¹² is each independently halogen, an optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₆ straight, branched or cyclic alkyl group, or optionally halogenated C₁-C₆ straight, branched or cyclic alkoxy group, A² is a single bond or C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, s is 0 or 1, t is an integer of 0 to 2, c is an integer satisfying: 0≤c≤5+2t−e, d is 0 or 1, e is an integer of 1 to 3, in case of e=1, X is an acid labile group, and in case of e=2 or 3, X is hydrogen or an acid labile group, at least one X being an acid labile group.

In a preferred embodiment, the polymer further comprises recurring units of at least one type selected from units having the formulae (B3), (B4), and (B5):

wherein R^(A) is as defined above, R¹³ and R¹⁴ are each independently a hydroxyl group, halogen atom, acetoxy group, optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₈ straight, branched or cyclic alkyl group, optionally halogenated C₁-C₈ straight, branched or cyclic alkoxy group, or optionally halogenated C₂-C₈ straight, branched or cyclic alkylcarbonyloxy group, R¹⁵ is an acetyl group, acetoxy group, C₁-C₂₀ straight, branched or cyclic alkyl group, C₁-C₂₀ straight, branched or cyclic alkoxy group, C₂-C₂₀ straight, branched or cyclic acyloxy group, C₂-C₂₀ straight, branched or cyclic alkoxyalkyl group, C₂-C₂₀ alkylthioalkyl group, halogen atom, nitro group, cyano group, sulfinyl group, or sulfonyl group, A³ is a single bond or C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, f and g are each independently an integer of 0 to 4, h is 0 or 1, j is an integer of 0 to 5, and k is an integer of 0 to 2.

In a preferred embodiment, the polymer further comprises recurring units of at least one type selected from units having the formulae (B6) to (B13):

wherein R^(B) is each independently hydrogen or methyl, Z¹ is a single bond, phenylene group, —O—Z¹²—, or —C(═O)—Z¹¹—Z¹²—, Z¹¹ is —O— or —NH—, Z¹² is a C₁-C₆ straight, branched or cyclic alkylene, C₂-C₆ straight, branched or cyclic alkenylene or phenylene group, which may contain a carbonyl, ester, ether or hydroxy moiety, Z² is a single bond or —Z²¹—C(═O)—O—, Z²¹ is a C₁-C₂₀ straight, branched or cyclic divalent hydrocarbon group which may contain a heteroatom-containing moiety, Z³ is a single bond, methylene, ethylene, phenylene, fluorinated phenylene, —O—Z³²—, or —C(═O)—Z³¹—Z³²—, Z³¹ is —O— or —NH—, Z³² is a C₁-C₆ straight, branched or cyclic alkylene, C₂-C₆ straight, branched or cyclic alkenylene or phenylene group, which may contain a carbonyl, ester, ether or hydroxy moiety, Z⁴ is a single bond or a C₁-C₃₀ straight, branched or cyclic divalent hydrocarbon group which may contain a heteroatom, u is 0 or 1, with the proviso that u is 0 when Z⁴ is a single bond, R²¹ to R³⁸ are each independently a C₁-C₂₀ straight, branched or cyclic monovalent hydrocarbon group which may contain a heteroatom-containing moiety, or R²¹ and R²² may bond together to form a ring with the sulfur atom to which they are attached, or any two of R²³, R²⁴ and R²⁵, any two of R²⁶, R²⁷ and R²⁸ or any two of R²⁹, R³⁰ and R³¹ may bond together to form a ring with the sulfur atom to which they are attached. A is hydrogen or trifluoromethyl, and M⁻ is a non-nucleophilic counter ion.

The positive resist composition may further comprise (C) a fluorinated polymer comprising recurring units having the formula (C1) and recurring units of at least one type selected from units having the formulae (C2), (C3), (C4), and (C5).

Herein R^(B) is each independently hydrogen or methyl, R^(C) is each independently hydrogen, fluorine, methyl or trifluoromethyl, R⁴¹ is hydrogen or a C₁-C₅ straight or branched monovalent hydrocarbon group in which a heteroatom may intervene in a carbon-carbon bond, R⁴² is a C₁-C₅ straight or branched monovalent hydrocarbon group in which a heteroatom may intervene in a carbon-carbon bond, R⁴³, R^(43b), R^(45a) and R^(45b) are each independently hydrogen or a C₁-C₁₀ straight, branched or cyclic alkyl group, R⁴⁴, R⁴⁶, R⁴⁷ and R⁴⁸ are each independently hydrogen, a C₁-C₁₅ straight, branched or cyclic monovalent hydrocarbon group or monovalent fluorinated hydrocarbon group, or an acid labile group, with the proviso that an ether or carbonyl moiety may intervene in a carbon-carbon bond in the monovalent hydrocarbon groups or monovalent fluorinated hydrocarbon groups represented by R⁴⁴, R⁴⁶, R⁴⁷ and R⁴⁸, x is an integer of 1 to 3, y is an integer satisfying: 0≤y≤5+2z−x, z is 0 or 1, m is an integer of 1 to 3, X¹ is a single bond, —C(═O)—O— or —C(═O)—NH—, and X² is a C₁-C₂₀ straight, branched or cyclic (m+1)-valent hydrocarbon group or fluorinated hydrocarbon group.

The positive resist composition may further comprise (D) an organic solvent and/or (E) a photoacid generator.

In another aspect, the invention provides a resist pattern forming process comprising the steps of applying the positive resist composition defined above onto a processable substrate to form a resist film thereon, exposing the resist film patternwise to high-energy radiation, and developing the resist film in an alkaline developer to form a resist pattern.

Typically, the high-energy radiation is EUV or EB.

Preferably, the processable substrate has an outermost surface of silicon-containing material. Typically, the processable substrate is a photomask blank.

In a further aspect, the invention provides a photomask blank having coated thereon the positive resist composition defined above.

Advantageous Effects of Invention

By virtue of the action of the sulfonium compound, the positive resist composition of the invention is effective for controlling acid diffusion, exhibits a very high resolution, and forms a pattern with minimal LER, during the steps of resist film formation, exposure and pattern formation. By virtue of the action of the recurring units of formula (B1), the resist composition is fully soluble in alkaline developer and is improved in adhesion to a processable substrate when it is coated thereon as a resist film.

The pattern forming process using the positive resist composition can form a resist pattern with minimal LER while maintaining a high resolution. The invention is best suited for a micropatterning process, typically EUV or EB lithography.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a diagram showing ¹H-NMR spectrum of Compound Q-1 in Synthesis Example 1.

FIG. 2 is a diagram showing ¹H-NMR spectrum of Compound Q-2 in Synthesis Example 2.

FIG. 3 is a diagram showing ¹⁹F-NMR spectrum of Compound Q-2 in Synthesis Example 2.

DESCRIPTION OF EMBODIMENTS

As used herein, the singular forms “a,” “an” and “the” include plural referents unless the context clearly dictates otherwise. “Optional” or “optionally” means that the subsequently described event or circumstances may or may not occur, and that description includes instances where the event or circumstance occurs and instances where it does not. The notation (Cn-Cm) means a group containing from n to m carbon atoms per group. In chemical formulae, the broken line depicts a valence bond.

The abbreviations and acronyms have the following meaning.

EB: electron beam

EUV: extreme ultraviolet

Mw: weight average molecular weight

Mn: number average molecular weight

Mw/Mn: molecular weight distribution or dispersity

GPC: gel permeation chromatography

PEB: post-exposure bake

PAG: photoacid generator

LER line edge roughness

CDU: critical dimension uniformity

It is understood that for some structures represented by chemical formulae, there can exist enantiomers and diastereomers because of the presence of asymmetric carbon atoms. In such a case, a single formula collectively represents all such isomers. The isomers may be used alone or in admixture.

Positive Resist Composition

Briefly stated, one embodiment of the invention is a positive tone resist composition comprising (A) a sulfonium compound and (B) a base polymer adapted to be decomposed under the action of acid to increase its solubility in alkaline developer.

(A) Sulfonium Compound

Component (A) in the positive resist composition is a sulfonium compound having the formula (A).

In formula (A), R¹, R² and R³ are each independently a C₁-C₂₀ straight, branched or cyclic monovalent hydrocarbon group which may contain a heteroatom. Examples of the monovalent hydrocarbon group include alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, t-butyl, n-pentyl, t-pentyl, n-hexyl, n-octyl, n-nonyl, n-decyl, cyclopentyl, cyclohexyl, 2-ethylhexyl, cyclopentylmethyl, cyclopentylethyl, cyclopentylbutyl, cyclohexylmethyl, cyclohexylethyl, cyclohexylbutyl, norbornyl, tricyclo[5.2.1.0^(2,6)′]decanyl, adamantyl, and adamantylmethyl, and aryl groups such as phenyl, naphthyl, and anthracenyl. In these hydrocarbon groups, one or more hydrogen may be replaced by a moiety containing a heteroatom such as oxygen, sulfur, nitrogen or halogen, or a moiety containing a heteroatom such as oxygen, sulfur or nitrogen may intervene between carbon atoms, so that the group may contain a hydroxy moiety, cyano moiety, carbonyl moiety, ether bond, thioether bond, ester bond, sulfonic acid ester bond, carbonate bond, carbamate bond, lactone ring, sultone ring, carboxylic anhydride or haloalkyl moiety.

In formula (A), p and q are each independently an integer of 0 to 5, and r is an integer of 0 to 4. Each of p, q and r is preferably 0, 1 or 2 for ease of synthesis and availability of reactants.

When p is 2 to 5, two adjoining groups R¹ may bond together to form a ring with the carbon atoms to which they are attached. When q is 2 to 5, two adjoining groups R² may bond together to form a ring with the carbon atoms to which they are attached. When r is 2 to 4, two adjoining groups R³ may bond together to form a ring with the carbon atoms to which they are attached.

Examples of the sulfonium compound having formula (A) are given below, but not limited thereto.

The sulfonium compound having formula (A) may be synthesized by a combination of well-known organic chemistry methods, for example, according to the scheme shown below.

Herein R¹, R², R³, p, q and r are as defined above, X_(a) ⁻; is an anion, and P_(ro) is a protective group.

There is first furnished a sulfonium salt having a sulfonium cation in which the carbon atom at α-position relative to the sulfur atom has a protected hydroxyl group substituted thereon. The protective group (P_(ro)) for a hydroxyl group is not particularly limited and may be any of protective groups commonly used in organic synthesis, for example, tert-butyl and methoxymethyl. The thus furnished sulfonium salt is subjected to deprotection reaction of the hydroxyl group, then treatment with a base, and separatory extraction with an organic solvent-water system, whereby the inventive sulfonium compound is extracted in the organic layer. Suitable bases used herein include sodium hydroxide and tetramethylammonium hydroxide, but are not limited thereto.

The sulfonium compound defined herein functions quite effectively as an acid diffusion inhibitor or regulator when applied to a resist composition. As used herein, the term “acid diffusion inhibitor” is a compound which traps the acid generated by the PAG in the resist composition in the exposed region to prevent the acid from diffusing into the unexposed region for thereby forming the desired pattern.

The inventive sulfonium compound follows an acid diffusion controlling mechanism which is described below. The acid generated by the PAG in the resist composition in the exposed region should have a strong acidity enough to deprotect the acid labile group on the base resin. For example, sulfonic acid which is fluorinated at α-position relative to sulfo group and sulfonic acid which is not fluorinated are generally used in the EB lithography. In a resist composition system where the PAG and the inventive sulfonium compound co-exist, the acid generated by the PAG is trapped by the inventive sulfonium compound (acid diffusion inhibitor), and instead, the sulfonium compound is converted from betaine structure to sulfonium salt. Another mechanism that the inventive sulfonium compound itself is photo-decomposed is contemplated. In this case, a weekly acidic phenolic compound is generated from decomposition, which has an insufficient acidity to deprotect the acid labile group on the base resin. In either case, the inventive sulfonium compound functions as a strong acid diffusion inhibitor.

The acid diffusion inhibitor, which may also be referred to as an onium salt type quencher, tends to form a resist pattern with a reduced LER as compared with the conventional quenchers in the form of amine compounds. This is presumably because salt exchange between strong acid and the inventive sulfonium compound is infinitely repeated. The site where strong acid is generated at the end of exposure shifts from the site where the onium salt of strong acid generation type is initially present. It is believed that since the cycle of photo-acid generation and salt exchange is repeated many times, the acid generation point is averaged, and this smoothing effect acts to reduce the LER of a resist pattern after development.

As the compound that exerts a quencher effect via the same mechanism, Patent Document 8 and JP-A 2003-005376 report carboxylic acid onium salts, alkanesulfonic acid onium salts, and arylsulfonic acid onium salts as the acid diffusion inhibitor. On use of an alkanesulfonic acid onium salt or arylsulfonic acid onium salt, the generated acid has such an acid strength that part thereof in the highly exposed region may induce deprotection reaction of the acid labile group on the base resin, leading to an increase of acid diffusion, which invite degradation of resist performance factors like resolution and CDU. Also in the case of alkane carboxylic acid onium salt, the generated carboxylic acid has a weak acidity and is not reactive with the acid labile group on the base resin. Thus the carboxylic acid onium salt achieves some improvement as acid diffusion inhibitor, but fails to satisfy an overall balance of resolution, LER and CDU in a more miniaturized region.

In contrast, the inventive sulfonium compound achieves substantial improvements in resist performance, which are not achievable with the above-mentioned acid diffusion inhibitors. Although the reason is not clearly understood, the following reason is presumed. The inventive sulfonium compound is characterized by a betaine structure possessing a sulfonium cation and a phenoxide anion within a common molecule, and the phenoxide moiety at the ortho position relative to S⁺. It is presumed that because of the location of phenoxide or anion in the vicinity of S⁺, the inventive sulfonium compound assumes a hypervalent structure, in which S⁺ and the phenoxide moiety are nearly in a three-center four-electron bond having a shorter bond distance than the ordinary ionic bond, that is, a covalent bond. Due to this structural specificity, the sulfonium phenoxide which is typically unstable remains stable. It is further presumed that since the inventive sulfonium compound is weakened in ionic bond nature as mentioned above, it is improved in organic solvent solubility and hence, more uniformly dispersed in the resist composition, leading to improvements in LER and CDU.

Although the conventional salt type quencher undergoes equilibration reaction in trapping the acid generated by the PAG and is thus inferior in acid diffusion control, the reaction of the inventive sulfonium compound is irreversible. This is accounted for by the driving force that the sulfonium compound is converted from the betaine structure to a stabler salt type structure by trapping the acid. In addition, the inventive sulfonium compound has a counter anion in the form of strongly basic phenoxide. For these reasons, the inventive sulfonium compound has a very high acid diffusion controlling ability. Since the contrast is thus improved, there is provided a resist composition which is also improved in resolution and collapse resistance.

In general, a sulfonium salt of week acid is low soluble in organic solvents because of originally an ionic compound, and becomes substantially insoluble in organic solvents if it takes a betaine structure. Since the low solubility sulfonium salt is awkward to uniformly disperse in a resist composition, it can cause degradation of LER and defect generation. In contrast, the inventive sulfonium compound has superior solvent solubility. Although the reason is not well understood, it is presumed that the structural specificity of the inventive sulfonium compound that the phenoxide moiety is at the ortho position relative to S⁺ participates in solubility. Due to this positional relationship, the inventive sulfonium compound assumes a hypervalent structure, and S⁺ and phenoxide moiety are nearly in a three-center, four-electron bond having a shorter bond distance than the ordinary ionic bond, that is, a covalent bond, by which organic solvent solubility is increased. As a result, the inventive sulfonium compound is uniformly dispersed in the resist composition, which is one of factors accounting for improved LER and CDU.

An appropriate amount of the sulfonium compound (A) is 0.1 to 50 parts, more preferably 1 to 30 parts by weight per 100 parts by weight of the base polymer (B). As long as its amount is in the range, the sulfonium compound fully functions as an acid diffusion inhibitor, eliminating any performance problems such as sensitivity drop, solubility shortage, and foreign particles. The sulfonium compound (A) may be used alone or in admixture of two or more.

(B) Base Polymer

The positive resist composition also comprises (B) a base polymer containing a polymer comprising recurring units having the formula (B1). It is noted that the recurring unit having formula (B1) is simply referred to as recurring unit (B1).

In formula (B1), R^(A) is hydrogen, fluorine, methyl or trifluoromethyl. R¹¹ is each independently halogen, an optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₆ straight, branched or cyclic alkyl group, or optionally halogenated C₁-C₆ straight, branched or cyclic alkoxy group. A¹ is a single bond or a C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, v is 0 or 1, w is an integer of 0 to 2, a is an integer in the range: 0≤a≤5+2w−b, and b is an integer of 1 to 3.

Where the recurring units (B1) are free of a linker (—CO—O-A¹-), that is, have formula (B1) wherein v=0 and A¹ is a single bond, suitable recurring units (B1) include those derived from 3-hydroxystyrene, 4-hydroxystyrene, 5-hydroxy-2-vinylnaphtbalene, and 6-hydroxy-2-vinylnaphthalene.

Where the recurring units (B1) have a linker (—CO—O-A¹-), preferred examples of the recurring units (B1) are given below, but not limited thereto.

The recurring units (B1) may be of one type or a mixture of two or more types. The recurring units (B1) are incorporated in an amount of preferably 10 to 95 mol %, more preferably 40 to 90 mol %, based on the entire recurring units of the polymer. It is noted that when recurring units of at least one type selected from recurring units having formulae (B3) and (B4) for imparting higher etch resistance are also incorporated in the polymer and these units have a phenolic hydroxyl group substituted thereon, the above-defined range is inclusive of an amount of these units (B3) and (B4).

In order that the resist composition serve as a positive resist composition wherein the exposed region of a resist film is dissolved in alkaline aqueous solution, the polymer should preferably further comprise units having an acidic functional group protected with an acid labile group, that is, units which are protected with an acid labile group, but turn alkali soluble under the action of acid. Since the acid labile groups (protective groups) in the recurring units undergo deprotection reaction under the action of acid, the polymer turns more soluble in alkaline developer.

Of the recurring units which are protected with an acid labile group, but turn alkali soluble under the action of acid, recurring units having the formula (B2) are most preferred. They are also referred to as recurring units (B2).

Herein R^(A) is as defined above. R¹² is each independently halogen, an optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₆ straight, branched or cyclic alkyl group, or optionally halogenated C₁-C₆ straight, branched or cyclic alkoxy group. A² is a single bond or C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, s is 0 or 1, t is an integer of 0 to 2, c is an integer satisfying: 0≤c≤5+2t−e, d is 0 or 1, and e is an integer of 1 to 3. When a is 1, X is an acid labile group. When a is 2 or 3, X is hydrogen or an acid labile group, at least one X being an acid labile group.

The recurring unit (B2) is the unit in which at least one of phenolic hydroxyl groups attached to aromatic ring is protected with an acid labile group, or a carboxyl group attached to aromatic ring is protected with an acid labile group. The acid labile group used herein is not particularly limited. It may be any of acid labile groups which are commonly used in many well-known chemically amplified resist compositions as long as it is eliminated with an acid to provide an acidic group.

The acid labile group is typically selected from tertiary alkyl groups and acetal groups. A choice of tertiary alkyl as the acid labile group is preferred in that when a resist film is formed as thin as 10 to 100 nm, and a fine pattern having a line width of 45 nm or less is printed therein, the pattern is provided with minimal LER. Of the tertiary alkyl groups, those of 4 to 18 carbon atoms are preferred because a corresponding monomer subject to polymerization may be recovered by distillation. In the tertiary alkyl group, suitable alkyl substituents on tertiary carbon are straight, branched or cyclic C₁-C₁₅ alkyl groups, some of which may contain an oxygen-containing functional group such as ether bond or carbonyl; and alkyl substituents on tertiary carbon may bond together to form a ring.

Examples of the alkyl substituent include methyl, ethyl, propyl, adamantyl, norbornyl, tetrahydrofuran-2-yl, 7-oxanorbornan-2-yl, cyclopentyl, 2-tetrahydrofuryl, tricyclo[5.2.1.0^(2,6)]decyl, tetracyclo[4.4.0.1^(2,5).1^(7,10)]dodecyl, and 3-oxo-1-cyclohexyl. Suitable tertiary alkyl groups having such alkyl substituents include t-butyl, t-pentyl, 1-ethyl-1-methylpropyl, 1,1-diethylpropyl, 1,1,2-trimethylpropyl, 1-adamantyl-1-methylethyl, 1-methyl-1-(2-norbornyl)ethyl, 1-methyl-1-(tetrahydrofuran-2-yl)ethyl, 1-methyl-1-(7-oxanorbornan-2-yl)ethyl, 1-methylcyclopentyl, 1-ethylcyclopentyl, 1-propylcyclopentyl, 1-isopropylcyclopentyl, 1-cyclopentylcyclopentyl, 1-cyclohexylcyclopentyl, 1-(2-tetrahydrofuryl)cyclopentyl, 1-(7-oxanorbornan-2-yl)cyclopentyl, 1-methylcyclohexyl, 1-ethylcyclohexyl, 1-cyclopentylcyclohexyl, 1-cyclohexylcyclohexyl, 2-methyl-2-norbornyl, 2-ethyl-2-norbornyl, 8-methyl-8-tricyclo[5.2.1.0^(2,6)]decyl, 8-ethyl-8-tricyclo[5.2.1.0^(2,6)]decyl, 3-methyl-3-tetracyclo[4.4.0.1^(2,5).1^(7,10)]dodecyl, 3-ethyl-3-tetracyclo[4.4.0.1^(2,5).1^(7,10)]dodecyl, 2-methyl-2-adamantyl, 2-ethyl-2-adamantyl, 1-methyl-3-oxo-1-cyclohexyl, 1-methyl-1-(tetrahydrofuran-2-yl)ethyl, 5-hydroxy-2-methyl-2-adamantyl, and 5-hydroxy-2-ethyl-2-adamantyl.

Also, an acetal group of the formula (B2-1) is often used as the acid labile group. It is a good choice of the acid labile group that ensures to form a pattern having a substantially rectangular pattern-substrate interface in a consistent manner.

Herein R¹⁶ is hydrogen or a straight, branched or cyclic C₁-C₁₀ alkyl group, and Y is a straight, branched or cyclic C₁-C₃₀ alkyl group.

In formula (B2-1), R¹⁶ is hydrogen or a straight, branched or cyclic C₁-C₁₀ alkyl group. A choice of R¹⁶ may depend on the designed sensitivity of acid labile group to acid. For example, hydrogen is selected when the acid labile group is designed to ensure relatively high stability and to be decomposed with strong acid. A straight alkyl group is selected when the acid labile group is designed to have relatively high reactivity and high sensitivity to pH changes. Although the choice varies with a particular combination of acid generator and basic compound in the resist composition, R¹⁶ is preferably a group in which the carbon in bond with acetal carbon is secondary, when the acid labile group is designed to have a relatively large alkyl group substituted at the end and a substantial change of solubility by decomposition. Examples of R¹⁶ bonded to acetal carbon via secondary carbon include isopropyl, sec-butyl, cyclopentyl, and cyclohexyl.

Of the acetal groups, an acetal group containing a C₇-C₃₀ polycyclic alkyl group (Y) is preferred for higher resolution. When Y is a polycyclic alkyl group, a bond is preferably formed between secondary carbon on the polycyclic structure and acetal oxygen. The acetal oxygen bonded to secondary carbon on the cyclic structure, as compared with the acetal oxygen bonded to tertiary carbon, ensures that a corresponding polymer becomes a stable compound, suggesting that the resist composition has better shelf stability and is not degraded in resolution. Said acetal oxygen, as compared with Y bonded to primary carbon via straight alkyl of at least one carbon atom, ensures that a corresponding polymer has a higher glass transition temperature (Tg), suggesting that a resist pattern after development is not deformed by bake.

Examples of the acetal group having formula (B2-1) are given below.

Herein R¹⁶ is as defined above.

Another choice of acid labile group is to bond (—CH₂COO-tertiary alkyl) to a phenolic hydroxyl group. The tertiary alkyl group used herein may be the same as the aforementioned tertiary alkyl groups used for the protection of phenolic hydroxyl group.

The recurring units (B2) may be of one type or a mixture of two or more types. In the polymer, the recurring units (B2) are preferably incorporated in a range of 5 to 45 mol % based on the overall recurring units.

In a preferred embodiment, the polymer further comprises recurring units of at least one type selected from units of the formulae (B3), (B4) and (B5). These recurring units are simply referred to as recurring units (B3), (B4) and (B5), respectively.

Herein R^(A) is as defined above. R¹³ and R¹⁴ are each independently a hydroxyl group, halogen atom, acetoxy group, optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₈ straight, branched or cyclic alkyl group, optionally halogenated C₁-C₈ straight, branched or cyclic alkoxy group, or optionally halogenated C₂-C₈ straight, branched or cyclic alkylcarbonyloxy group. R¹⁵ is an acetyl group, acetoxy group, C₁-C₂₀ straight, branched or cyclic alkyl group, C₁-C₂₀ straight, branched or cyclic alkoxy group, C₂-C₂₀ straight, branched or cyclic acyloxy group, C₂-C₂₀ straight, branched or cyclic alkoxyalkyl group, C₂-C₂₀ alkylthioalkyl group, halogen atom, nitro group, cyano group, sulfinyl group, or sulfonyl group. A³ is a single bond or C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, f and g are each independently an integer of 0 to 4, h is 0 or 1, j is an integer of 0 to 5, and k is an integer of 0 to 2.

When recurring units of at least one type selected from recurring units (B3) to (B5) are incorporated, better performance is obtained because not only the aromatic ring possesses etching resistance, but the cyclic structure incorporated into the main chain also exerts the effect of improving resistance to EB irradiation during etching and pattern inspection steps.

The recurring units (B3) to (B5) may be of one type or a combination of plural types. In order to exert an effect of improving etching resistance, the units (B3) to (B5) are preferably incorporated in a range of at least 5 mol % based on the overall recurring units of the polymer. The units (B3) to (B5) are also preferably incorporated in a range of up to 35 mol %, more preferably up to 30 mol % based on the overall recurring units of the polymer. Where the units (B3) to (B5) are free of a functional group or have a functional group other than the aforementioned ones, the formation of development defects is avoided as long as the amount of these units incorporated is up to 35 mol %.

The preferred polymer contains recurring units (B1), recurring units (B2), and recurring units of at least one type selected from recurring units (B3) to (B5) as its constituents because both etch resistance and resolution are improved. These recurring units are preferably incorporated in an amount of at least 60 mol %, more preferably at least 70 mol %, even more preferably at least 80 mol %, based on the overall recurring units of the polymer.

The polymer may further contain (meth)acrylate units protected with an acid labile group, and/or (meth)acrylate units having an adhesive group such as lactone structure or hydroxyl group other than phenolic hydroxyl group. These units may be incorporated for fine adjustment of properties of a resist film, though they are optional. When incorporated, these recurring units are used in an amount of preferably 0 to 30 mol %, more preferably 0 to 20 mol %. Examples of the (meth)acrylate units having such an adhesive group include units having the formulae (b1) to (b3):

wherein R^(A) is as defined above, G¹ is —O— or methylene, G² is hydrogen or hydroxyl, G³ is a C₁-C₄ straight, branched or cyclic alkyl group, and n is an integer of 0 to 3. These units do not exhibit acidity and may be used as supplemental units for imparting adhesion to substrates or for adjusting solubility.

The polymer may further comprise recurring units of at least one type selected from recurring units having formulae (B6) to (B13). Notably these recurring units are simply referred to as recurring units (B6) to (B13), respectively. Incorporation of any of these units is effective for suppressing acid diffusion, improving resolution, and forming a pattern with reduced LER.

Herein R^(B) is each independently hydrogen or methyl Z¹ is a single bond, phenylene group, —O—Z¹²—, or —C(═O)—Z¹¹—Z¹²—, wherein Z¹¹ is —O— or —NH—, Z¹² is a C₁-C₆ straight, branched or cyclic alkylene, C₂-C₆ straight, branched or cyclic alkenylene or phenylene group, which may contain a carbonyl, ester, ether or hydroxy moiety. Z² is a single bond or Z²¹—C(═O)—O—, wherein Z²¹ is a C₁-C₂₀ straight, branched or cyclic divalent hydrocarbon group which may contain a heteroatom-containing moiety. Z³ is a single bond, methylene, ethylene, phenylene, fluorinated phenylene, —O—Z³²—, or —C(O)—Z³¹—Z³²— wherein Z³¹ is —O— or —NH—, Z³² is a C₁-C₆ straight, branched or cyclic alkylene, C₂-C₆ straight, branched or cyclic alkenylene or phenylene group, which may contain a carbonyl, ester, ether or hydroxy moiety. Z⁴ is a single bond or a C₁-C₃₀ straight, branched or cyclic divalent hydrocarbon group which may contain a heteroatom, u is 0 or 1, with the proviso that u is 0 when Z⁴ is a single bond,

R²¹ to R³⁸ are each independently a C₁-C₂₀ straight, branched or cyclic monovalent hydrocarbon group in which at least one hydrogen atom may be replaced by a moiety containing a heteroatom such as oxygen, sulfur, nitrogen or halogen, or in which at least one carbon atom may be replaced by a moiety containing a heteroatom such as oxygen, sulfur or nitrogen, so that the group may contain a hydroxy, cyano, carbonyl, ether bond, ester bond, sulfonic acid ester bond, carbonate bond, lactone ring, sultone ring, carboxylic anhydride, or haloalkyl moiety. R²¹ and R²² may bond together to form a ring with the sulfur atom to which they are attached, any two of R²³, R²⁴ and R²⁵, any two of R²⁶, R²⁷ and R²⁸, or any two of R²⁹, R³⁰ and R³¹ may bond together to form a ring with the sulfur atom to which they are attached. “A” is hydrogen or trifluoromethyl. M⁻ is a non-nucleophilic counter ion.

In formulae (B7) and (B11) wherein Z² is —Z²¹—C(=O)—O—, Z²¹ is a divalent hydrocarbon group which may contain a heteroatom-containing moiety. Illustrative, non-limiting examples of the hydrocarbon group Z²¹ are given below.

In the recurring units (B6) and (B10), examples of the non-nucleophilic counter ion M⁻ include those described in JP-A 2010-113209 and JP-A 2007-145797. Examples of the recurring units (B7) wherein R²³ is hydrogen include those described in JP-A 2010-116550. Examples of the recurring units (B7) wherein R²³ is trifluoromethyl include those described in JP-A 2010-077404. Examples of the anion moiety in the monomer from which the recurring units (B8) and (B12) are derived include those described in JP-A 2012-246265 and JP-A 2012-246426.

Preferred examples of the anion moiety in the monomer from which the recurring units (B9) and (B13) are derived are shown below, but not limited thereto.

Examples of the sulfonium cation in formulae (B7) to (B9) wherein any two of R²³, R²⁴ and R²⁵, any two of R²⁶, R²⁷ and R²⁸, or any two of R²⁹, R³⁰ and R³¹ bond together to form a ring with the sulfur atom to which they are attached, are shown below.

It is noted that R³⁹ is the same as defined and exemplified for R²¹ to R³⁸.

Specific examples of the sulfonium cation in formulae (B7) to (B9) are shown below, but not limited thereto.

Specific examples of the iodonium cation in formulae (B11) to (B13) are shown below, but not limited thereto.

The recurring units (B6) to (B13) are units capable of generating an acid upon receipt of high-energy radiation. With the relevant units bound into a polymer, an appropriate control of acid diffusion becomes possible, and a pattern with minimal LER can be formed. Since the acid-generating unit is bound to a polymer, the phenomenon that acid volatilizes from the exposed region and re-deposits on the unexposed region during bake in vacuum is suppressed. This is effective for reducing LER and for suppressing unwanted deprotection reaction in the unexposed region for thereby reducing defects. The content of recurring units (B6) to (B13) is preferably 0.5 to 30 mol % based on the overall recurring units of the polymer.

The base polymer (B) may be a mixture of a polymer comprising recurring units (B1) and recurring units (B6) to (B13) and a polymer free of recurring units (B6) to (B13). In this embodiment, the polymer free of recurring units (B6) to (B13) is preferably used in an amount of 2 to 5,000 parts, more preferably 10 to 1,000 parts by weight per 100 parts by weight of the polymer comprising recurring units (B6) to (B13).

The polymer may be synthesized by combining suitable monomers optionally protected with a protective group, copolymerizing them in the standard way, and effecting deprotection reaction if necessary. The copolymerization reaction is preferably radical polymerization or anionic polymerization though not limited thereto. For the polymerization reaction, reference may be made to JP-A 2004-115630.

The polymer should preferably have a weight average molecular weight (Mw) of 1,000 to 50,000, and more preferably 2,000 to 20,000. A Mw of at least 1,000 eliminates the risk that pattern features are rounded at their top, inviting degradations of resolution and LER. A Mw of up to 50,000 eliminates the risk that LER is increased particularly when a pattern with a line width of up to 100 nm is formed. As used herein, Mw is measured by GPC versus polystyrene standards using tetrahydrofuran (THF) solvent.

The polymer preferably has a narrow molecular weight distribution or dispersity (Mw/Mn) of 1.0 to 2.0, more preferably 1.0 to 1.8. A polymer with such a narrow dispersity eliminates any foreign particles left on the pattern or profile degradation of the pattern after development.

(C) Fluorinated Polymer

The resist composition may further comprise (C) a fluorinated polymer comprising recurring units having the formula (C1) and recurring units of at least one type selected from recurring units having the formulae (C2), (C3), (C4), and (C5), for the purposes of enhancing contrast, preventing chemical flare of acid upon exposure to high-energy radiation, preventing mixing of acid from an anti-charging film in the step of coating an anti-charging film-forming material on a resist film, and suppressing unexpected unnecessary pattern degradation. Notably, recurring units having formulae (C1), (C2), (C3), (C4), and (C5) are simply referred to as recurring units (C1), (C2), (C3), (C4), and (C5), respectively. Since the fluorinated polymer also has a surface active function, it can prevent insoluble residues from re-depositing onto the substrate during the development step and is thus effective for preventing development defects.

Herein R^(B) is each independently hydrogen or methyl. R^(C) is each independently hydrogen, fluorine, methyl or trifluoromethyl. R⁴¹ is hydrogen or a C₁-C₅ straight or branched monovalent hydrocarbon group in which a heteroatom may intervene in a carbon-carbon bond. R⁴² is a C₁-C₅ straight or branched monovalent hydrocarbon group in which a heteroatom may intervene in a carbon-carbon bond. R^(43a), R^(43b), R^(45a) and R^(45b) are each independently hydrogen or a C₁-C₁₀ straight, branched or cyclic alkyl group. R⁴⁴, R⁴⁶, R⁴⁷ and R⁴⁸ are each independently hydrogen, a C₁-C₁₅ straight, branched or cyclic monovalent hydrocarbon group or monovalent fluorinated hydrocarbon group, or an acid labile group, with the proviso that an ether or carbonyl moiety may intervene in a carbon-carbon bond in the monovalent hydrocarbon groups or monovalent fluorinated hydrocarbon groups represented by R⁴⁴, R⁴⁶, R⁴⁷ and R⁴⁸. The subscript x is an integer of 1 to 3, y is an integer satisfying: 0≤y≤5+2z−x, z is 0 or 1, m is an integer of 1 to 3. X¹ is a single bond, —C(═O)—O— or —C(═O)—NH—. X² is a C₁-C₂₀ straight, branched or cyclic (m+1)-valent hydrocarbon group or fluorinated hydrocarbon group.

Suitable monovalent hydrocarbon groups include alkyl, alkenyl and alkynyl groups, with the alkyl groups being preferred. Suitable alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-butyl, and n-pentyl. In these groups, a moiety containing a heteroatom such as oxygen, sulfur or nitrogen may intervene in a carbon-carbon bond.

In formula (C1), —OR⁴¹ is preferably a hydrophilic group. In this case, R⁴¹ is preferably hydrogen or a C₁-C₅ alkyl group in which oxygen intervenes in a carbon-carbon bond.

Examples of the recurring unit (C1) are given below, but not limited thereto. Herein R^(B) is as defined above.

In formula (C1), X¹ is preferably —C(═O)—O— or —C(═O)—NH—. Also preferably R^(B) is methyl. The inclusion of carbonyl in X¹ enhances the ability to trap the acid originating from the anti-charging film. A polymer wherein R^(B) is methyl is a rigid polymer having a high glass transition temperature (Tg) which is effective for suppressing acid diffusion. As a result, the stability with time of a resist film is improved, and neither resolution nor pattern profile is degraded.

In formulae (C2) and (C3), examples of the alkyl group represented by R^(43a), R^(43b), R^(45a) and R^(45b) include methyl, ethyl, n-propyl, isopropyl, cyclopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, cyclobutyl, n-pentyl, cyclopentyl, n-hexyl, cyclohexyl, n-heptyl, n-octyl, n-nonyl, n-decyl, adamantyl, and norbornyl. Inter alia, C₁-C₆ straight, branched or cyclic alkyl groups are preferred.

In formulae (C2) to (C5), examples of the monovalent hydrocarbon group represented by R⁴⁴, R⁴⁶, R⁴⁷ and R⁴⁸ include alkyl, alkenyl and alkynyl groups, with the alkyl groups being preferred. Suitable alkyl groups include n-undecyl, n-dodecyl, tridecyl, tetradecyl and pentadecyl as well as those exemplified above. The monovalent fluorinated hydrocarbon groups correspond to the foregoing monovalent hydrocarbon groups in which one or more or even all carbon-bonded hydrogen atoms are substituted by fluorine atoms.

Examples of the C₁-C₂₀ straight, branched or cyclic (m+1)-valent hydrocarbon group or fluorinated hydrocarbon group include the foregoing monovalent hydrocarbon groups and monovalent fluorinated hydrocarbon groups, with a number (m) of hydrogen atoms being eliminated.

Examples of the recurring units (C2) to (C5) are given below, but not limited thereto. Herein R^(C) is as defined above.

The recurring unit (C1) is preferably incorporated in an amount of 5 to 85 mol %, more preferably 15 to 80 mol % based on the overall recurring units of the fluorinated polymer (C). The recurring units (D2) to (C5), which may be used alone or in admixture, are preferably incorporated in an amount of 15 to 95 mol %, more preferably 20 to 85 mol % based on the overall recurring units of the fluorinated polymer (C).

The fluorinated polymer (C) may comprise additional recurring units as well as the recurring units (C1) to (C5). Suitable additional recurring units include those described in U.S. Pat. No. 9,091,918 (JP-A 2014-177407, paragraphs [0046]-[0078]). When the fluorinated polymer (C) comprises additional recurring units, their content is preferably up to 50 mol % based on the overall recurring units.

The fluorinated polymer (C) may be synthesized by combining suitable monomers optionally protected with a protective group, copolymerizing them in the standard way, and effecting deprotection reaction if necessary. The copolymerization reaction is preferably radical polymerization or anionic polymerization though not limited thereto. For the polymerization reaction, reference may be made to JP-A 2004-115630.

The fluorinated polymer (C) should preferably have a Mw of 2,000 to 50,000, and more preferably 3,000 to 20,000. A fluorinated polymer with a Mw of less than 2,000 helps acid diffusion, degrading resolution and detracting from age stability. A polymer with too high Mw has a reduced solubility in solvent, leading to coating defects. The fluorinated polymer preferably has a dispersity (Mw/Mn) of 1.0 to 2.2, more preferably 1.0 to 1.7.

The fluorinated polymer (C) is preferably used in an amount of 0.01 to 30 parts, more preferably 0.1 to 20 parts by weight per 100 parts by weight of the base polymer (B).

(D) Organic Solvent

The positive resist composition may further comprise (D) an organic solvent. The organic solvent used herein is not particularly limited as long as the components are soluble therein. Examples of the organic solvent are described in JP-A 2008-111103, paragraphs [0144] to [0145] (U.S. Pat. No. 7,537,880). Specifically, exemplary solvents include ketones such as cyclohexanone and methyl-2-n-pentyl ketone; alcohols such as 3-methoxybutanol, 3-methyl-3-methoxybutanol, 1-methoxy-2-propanol, 1-ethoxy-2-propenol, and diacetone alcohol; ethers such as propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monoethyl ether, propylene glycol dimethyl ether, and diethylene glycol dimethyl ether; esters such as propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monoethyl ether acetate, ethyl lactate, ethyl pyruvate, butyl acetate, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, t-butyl acetate, t-butyl propionate, and propylene glycol mono-t-butyl ether acetate; and lactones such as γ-butyrolactone, and mixtures thereof. Where an acid labile group of acetal form is used, a high-boiling alcohol solvent such as diethylene glycol, propylene glycol, glycerol, 1,4-butanediol or 1,3-butanediol may be added for accelerating deprotection reaction of acetal. Of the above organic solvents, it is recommended to use 1-ethoxy-2-propanol, PGMEA, propylene glycol monomethyl ether, cyclohexanone, ethyl lactate, γ-butyrolactone, and mixtures thereof.

An appropriate amount of the organic solvent (D) used is 200 to 10,000 parts, more preferably 400 to 5,000 parts by weight per 100 parts by weight of the base polymer (B).

(E) Photoacid Generator

The resist composition may further comprise (E) a photoacid generator (PAG) in order that the composition function as a chemically amplified positive resist composition. The PAG may be any compound capable of generating an acid upon exposure to high-energy radiation. Suitable PAGs include sulfonium salts, iodonium salts, sulfonyldiazomethane, N-sulfonyloxyimide, and oxime-O-sulfonate acid generators. These PAGs may be used alone or in admixture of two or more.

Suitable PAGs include nonafluorobutane sulfonate, partially fluorinated sulfonates described in JP-A 2012-189977, paragraphs [0247]-[0251], partially fluorinated sulfonates described in JP-A 2013-101271, paragraphs [0261]-[0265], and those described in JP-A 2008-111103, paragraphs [0122]-[0142] and JP-A 2010-215608, paragraphs [0080]-[0081]. Among others, arylsulfonate and alkanesulfonate type PAGs are preferred because they generate acids having an appropriate strength to deprotect the acid labile group in recurring unit (B2).

The preferred acid generators are compounds having a sulfonium anion of the structure shown below. Notably the cation that pairs with the anion is as exemplified for the sulfonium cation in formulae (B7) to (B9).

An appropriate amount of the PAG (E) used is 1 to 30 parts, more preferably 2 to 20 parts by weight per 100 parts by weight of the base polymer (B). Where the base polymer contains recurring units (B6) to (B13), the PAG may be omitted.

(F) Basic Compound

In the resist composition, (F) a basic compound may be added as the acid diffusion inhibitor (other than component (A)) for the purpose of correcting a pattern profile or the like. The basic compound is effective for controlling acid diffusion. Even when the resist film is applied to a processable substrate having an outermost surface layer made of a chromium-containing material, the basic compound is effective for minimizing the influence of the acid generated in the resist film on the chromium-containing material. An appropriate amount of the basic compound added is 0 to 10 parts, and more preferably 0 to 5 parts by weight per 100 parts by weight of the base polymer (B).

Numerous basic compounds are known useful including primary, secondary, and tertiary aliphatic amines, mixed amines, aromatic amines, heterocyclic amines, nitrogen-containing compounds with carboxyl group, nitrogen-containing compounds with sulfonyl group, nitrogen-containing compounds with hydroxyl group, nitrogen-containing compounds with hydroxyphenyl group, alcoholic nitrogen-containing compounds, amide derivatives, imide derivatives, carbamate derivatives, and ammonium salts. Examples are described in Patent Document 9, for example, and any such compounds are useful. Of the foregoing basic compounds, preferred are tris[2-(methoxymethoxy)ethyl]amine, tris[2-(methoxymethoxy)ethyl]amine-N-oxide, dibutylaminobenzoic acid, morpholine derivatives and imidazole derivatives. The basic compounds may be used alone or in admixture.

(G) Surfactant

In the resist composition, any of surfactants commonly used for improving coating characteristics to the processable substrate may be added as an optional component. Numerous surfactants are known in the art, as described in JP-A 2004-115630, for example. A choice may be made with reference to such patent documents. An appropriate amount of the surfactant (G) used is 0 to 5 parts by weight per 100 parts by weight of the base polymer (B).

Process

A further embodiment of the invention is a resist pattern forming process comprising the steps of applying the resist composition defined above onto a processable substrate to form a resist film thereon, exposing the resist film patternwise to high-energy radiation, and developing the resist film in an alkaline developer to form a resist pattern.

Pattern formation using the resist composition of the invention may be performed by well-known lithography processes. In general, the resist composition is first applied onto a processable substrate such as a substrate for IC fabrication (e.g., Si, SiO, SiO₂, SiN, SiON, TiN, WSi, BPSG, SOG, organic antireflective coating, etc.) or a substrate for mask circuit fabrication (e.g., Cr, CrO, CrON, MoSi₂, Si, SiO, SiO₂, etc.) by a suitable coating technique such as spin coating. The coating is prebaked on a hotplate at a temperature of 60 to 150° C. for 1 to 20 minutes, preferably at 80 to 140° C. for 1 to 10 minutes to form a resist film of 0.03 to 2 μm thick.

Then the resist film is exposed patternwise to high-energy radiation such as UV, deep UV, excimer laser, EUV, x-ray, γ-ray or synchrotron radiation through a mask having a desired pattern or directly by EB writing. The exposure dose is preferably 1 to 300 mJ/cm², more preferably 10 to 200 mJ/cm² in the case of high-energy radiation or 1 to 300 μC/cm², more preferably 10 to 200 μC/cm² in the case of EB. The resist composition of the invention is especially effective on patternwise exposure to EUV or EB. The exposure may be performed by conventional lithography whereas the immersion lithography of holding a liquid between the mask and the resist film may be employed if desired. When the immersion lithography is applied, a protective film which is insoluble in water may be formed on the resist film.

The resist film is then baked (PEB) on a hotplate at 60 to 150° C. for 1 to 20 minutes, preferably at 80 to 140° C. for 1 to 10 minutes. Thereafter the resist film is developed with a developer in the form of an aqueous base solution, for example, 0.1 to 5 wt %, preferably 2 to 3 wt % aqueous solution of tetramethylammonium hydroxide (TMAH) for 0.1 to 3 minutes, preferably 0.5 to 2 minutes by conventional techniques such as dip, puddle and spray techniques. In this way, a desired resist pattern is formed on the substrate.

From the resist composition, a pattern with a high resolution and minimal LER may be formed. The resist composition is effectively applicable to a processable substrate, specifically a substrate having a surface layer of material to which a resist film is less adherent and which is likely to invite pattern stripping or pattern collapse, and particularly a substrate having sputter deposited thereon metallic chromium or a chromium compound containing at least one light element selected from oxygen, nitrogen and carbon or a substrate having an outermost surface layer of SiO_(x). The invention is especially effective for pattern formation on a photomask blank as the substrate.

Even on use of a processable substrate having an outermost surface layer made of a chromium or silicon-containing material which tends to adversely affect the profile of resist pattern, typically photomask blank, the resist pattern forming process is successful in forming a pattern with a high resolution and reduced LER via exposure to high-energy radiation because the resist composition is effective for controlling acid diffusion at the substrate interface.

EXAMPLE

Examples of the invention are given below by way of illustration and not by way of limitation. The abbreviation “pbw” is parts by weight. THF is tetrahydrofuran. The copolymer composition is expressed by a molar ratio. Mw is measured by GPC versus polystyrene standards. Analytic instruments are as shown below.

IR: NICOLET 6700 by Thermo Fisher Scientific Inc.

¹H-NMR: ECA-500 by JEOL Ltd.

¹⁹F-NMR: ECA-500 by JEOL Ltd.

LC-MS: ACQUITY UPLC H-Class system and ACQUITY QDa by Waters.

1) Synthesis of Sulfonium Compounds Synthesis Example 1 Synthesis of 2-(diphenylsulfonio)phenolate Q-1 Synthesis Example 1-1 Synthesis of (2-tert-butoxyphenyl)diphenylsulfonium chloride (Intermediate A)

A Grignard reagent was prepared in THF by the standard method using 2.6 g of magnesium and 16 g of 2-tert-butoxychlorobenzene. To the Grignard reagent were added 6.1 g of diphenyl sulfoxide and 27 g of THF. Then 9.8 g of chlorotrimethylsilane was added dropwise at room temperature to the solution, which was aged for 3 hours. After aging, a saturated ammonium chloride aqueous solution was added to quench the reaction, and 100 g of water was added to the reaction solution, which was washed with diisopropyl ether, yielding an aqueous solution of the target compound, (2-tert-butoxyphenyl)diphenylsulfonium chloride, designated Intermediate A. The compound was fed to the next step without isolation.

Synthesis Example 1-2 Synthesis of (2-hydroxyphenyl)diphenylsulfonium tosylate (Intermediate B)

To the entire amount of the Intermediate A solution, 6.8 g of p-toluenesulfonic acid monohydrate, 6.1 g of 25 wt % sodium hydroxide aqueous solution, 30 g of water and 150 g of methylene chloride were added and stirred for 30 minutes. The organic layer was taken out, washed with water, and concentrated under reduced pressure to remove methylene chloride, yielding a crude form of (2-tert-butoxyphenyl)diphenylsulfonium tosylate. To the crude form were added 6 g of p-toluenesulfonic acid monohydrate and 50 g of methanol. The solution was held at 80° C. for 14 hours for deprotection reaction. The reaction solution was concentrated at 60° C. under reduced pressure, methylene chloride was added, and the organic layer was washed with ultrapure water. After washing, the organic layer was concentrated under reduced pressure. To the residue, tert-butyl methyl ether was added for recrystallization. The resulting crystal was collected and dried in vacuum, obtaining the target compound, (2-hydroxyphenyl)diphenylsulfonium tosylate, designated Intermediate B. Amount 6 g, overall yield from Intermediate A synthesis 45%.

Synthesis Example 1-3 Synthesis of 2-(diphenylsulfonio)phenolate Q-1

To a solution of 4.5 g of Intermediate B in 22 g of methylene chloride, 1.6 g of 25 wt % sodium hydroxide aqueous solution and 10 g of pure water were added and stirred for 30 minutes. After stirring, 1-pentanol was added, and the organic layer was taken out, washed with water, and concentrated under reduced pressure. Methyl isobutyl ketone was added to the concentrate, which was concentrated under reduced pressure again. To the residue, diisopropyl ether was added for recrystallization. The resulting crystal was collected and dried in vacuum, obtaining the target compound, 2-(diphenylsulfonio)phenolate Q-1. Amount 2.5 g, yield 91%.

The target compound was analyzed by spectroscopy. The NMR spectrum, ¹H-NMR in DMSO-d₆ is shown in FIG. 1. In ¹H-NMR analysis, minute amounts of residual solvents (diisopropyl ether, methyl isobutyl ketone) and water were observed.

IR (D-ATR): v=2990, 1580, 1485, 1478, 1442, 1360, 1285, 1007, 997, 840, 745, 724, 687 cm⁻¹

LC-MS: Positive [M+H] 279 (corresponding to C₁₈H₁₅OS⁺)

Synthesis Example 2 Synthesis of 2-(diphenylsulfonio)-5-fluorophenolate Q-2 Synthesis Example 2-1 Synthesis of 1-bromo-2-tert-butoxy-4-fluorobenzene (Intermediate C)

With heating at 50° C., 1 kg of 1-bromo-2,4-difluorobenzene was added dropwise to a solution of 553 g of potassium tert-butoxide in 4 kg of THF, which was aged at 50° C. for 20 hours. The reaction solution was concentrated under reduced pressure, after which 3.5 kg of hexane and 3 kg of pure water were added to the concentrate. The organic layer was taken out, washed with water, and concentrated under reduced pressure. Methanol was added to the residue for recrystallization. The resulting crystal was collected by filtration and heat dried in vacuum, obtaining the target compound, 1-bromo-2-tert-butoxy-4-fluorobenzene, designated Intermediate C. Amount 815 g, yield 66%.

Synthesis Example 2-2 Synthesis of (2-hydroxy-4-fluorophenyl)diphenylsulfonium tosylate (Intermediate D)

A Grignard reagent was prepared in THF by the standard method using 72 g of magnesium and 741 g of Intermediate C. To the Grignard reagent were added 202 g of diphenyl sulfoxide and 400 g of THF. With heating at 60° C., 325 g of chlorotrimethylsilane was added dropwise to the solution, which was aged for 15 hours. After aging, the reaction solution was ice cooled, and 104 g of 35 wt % hydrochloric acid and 2,300 g of pure water were added to quench the reaction. Thereafter, 2.5 kg of diisopropyl ether was added to the reaction solution, from which the water layer was taken out. The water layer was combined with 200 g of 35 wt % hydrochloric acid and aged at 60° C. for 5 hours, allowing crystals to precipitate. The crystal precipitate was collected by filtration, washed with diisopropyl ether, and heat dried under reduced pressure, obtaining 229 g (yield 59%) of the target compound, (2-hydroxy-4-fluorophenyl)diphenylsulfonium tosylate, designated Intermediate D.

Synthesis Example 2-3 Synthesis of 2-(diphenylsulfonio)-5-fluorophenolate Q-2

A mixture of 3.0 g of Intermediate D, 1.2 g of 25 wt % sodium hydroxide aqueous solution, 50 g of methylene chloride and 20 g of pure water was stirred for 10 minutes. Thereafter, the organic layer was taken out, washed with pure water, and concentrated under reduced pressure. Diisopropyl ether was added to the concentrate for recrystallization. The resulting crystal was collected and dried in vacuum, obtaining the target compound, 2-(diphenylsulfonio)-5-fluorophenolate Q-2. Amount 1.5 g, yield 66%.

The target compound was analyzed by spectroscopy. The NMR spectra, ¹H-NMR and ¹⁹F-NMR in DMSO-d₆ are shown in FIGS. 2 and 3. In ¹H-NMR analysis, minute amounts of residual solvents (diisopropyl ether, methyl isobutyl ketone) and water were observed.

IR (D-ATR): v=2992, 1590, 1530, 1488, 1478, 1446, 1317, 1284, 1148, 1115, 964, 834, 763, 755, 688 cm⁻¹

LC-MS: Positive [M+H]⁺ 297 (corresponding to C₁₈H₁₄OFS⁺)

2) Synthesis of Polymers Synthesis Example 3-1 Synthesis of Polymer A1

A 3-L flask was charged with 407.5 g of acetoxystyrene, 42.5 g of acenaphthylene, and 1,275 g of toluene as solvent. The reactor was cooled at −70° C. in a nitrogen atmosphere, after which vacuum pumping and nitrogen flow were repeated three times.

The reactor was warmed up to room temperature, whereupon 34.7 g of 2,2′-azobis(2,4-dimethylvaleronitrile) (V-65 by Wako Pure Chemical Industries, Ltd.) was added as polymerization initiator. The reactor was heated at 55° C., whereupon reaction ran for 40 hours. With stirring, a mixture of 970 g of methanol and 180 g of water was added dropwise to the reaction solution. The solution separated into two layers during 30 minutes of standing. The lower layer (polymer layer) was concentrated under reduced pressure. The polymer layer concentrate was dissolved again in 0.45 L of methanol and 0.54 L of THF, to which 160 g of triethylamine and 30 g of water were added. The reaction mixture was heated at 60° C. for 40 hours for deprotection reaction. The reaction solution was concentrated under reduced pressure. To the concentrate, 548 g of methanol and 112 g of acetone were added for dissolution. With stirring, 990 g of hexane was added dropwise to the solution. The solution separated into two layers during 30 minutes of standing. To the lower layer (polymer layer) was added 300 g of THF. With stirring, 1,030 g of hexane was added dropwise thereto. After 30 minutes of standing, the lower layer (polymer layer) was concentrated under reduced pressure. The polymer solution was neutralized with 82 g of acetic acid. The reaction solution was concentrated, dissolved in 0.3 L of acetone, and poured into 10 L of water for precipitation. The precipitate was filtered and dried, yielding 280 g of a white polymer. On analysis by ¹H-NMR and GPC, the polymer had a copolymer compositional ratio of hydroxystyrene:acenaphthylene=89.3:10.7, Mw=5,000, and Mw/Mn=1.63.

Under acidic conditions, 100 g of the polymer was reacted with 50 g of 2-methyl-1-propenyl methyl ether. This was followed by neutralization, phase separation, and crystallization, obtaining 125 g of a polymer, designated Polymer A1.

Synthesis Examples 3-2 to 3-9 Synthesis of Polymers A2 to A7 and Polymers P1 to P2

Polymers A2 to A7 and Polymers P1 to P2 were synthesized as in Synthesis Example 3-1 aside from changing the monomers and reagents.

Polymers A1 to A7 and Polymers P1 to P2 had the following structures.

3) Preparation of Positive Resist Compositions Examples 1-1 to 1-35 and Comparative Examples 1-1 to 1-2

The acid diffusion inhibitor is selected from sulfonium compounds Q-1 and Q-2 of formula (A) synthesized in Synthesis Examples and comparative acid diffusion inhibitors Q-3 and Q-4; the base polymer is from Polymers A1 to A7 and Polymers P1 to P2; the photoacid generator is from PAG-A to PAG-C; and the additive is from fluorinated polymers, i.e., Polymers C1 to C3. A positive resist composition in solution form was prepared by dissolving the components in an organic solvent according to the formulation shown in Table 1, and filtering through a UPE filter with a pore size of 0.02 μm. The organic solvents in Table 1 are PGMEA (propylene glycol monomethyl ether acetate), EL (ethyl lactate), PGME (propylene glycol monomethyl ether), and CyH (cyclohexanone). In each composition, 0.075 pbw of surfactant PF-636 (Omnova Solutions) was added per 100 pbw of solids.

Notably, Q-3, Q-4, PAG-A, PAG-B, PAG-C, and Polymers C1 to C3 are identified below.

TABLE 1 Acid diffusion Acid Resist inhibitor Resin 1 Resin 2 generator Additive Solvent 1 Solvent 2 Solvent 3 composition (pbw) (pbw) (pbw) (pbw) (pbw) (pbw) (pbw) (pbw) Example 1 R-1 Q-1 Polymer A1 PAG-A PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-2 R-2 Q-1 Polymer A1 PAG-B PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-3 R-3 Q-1 Polymer A1 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-4 R-4 Q-2 Polymer A1 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-5 R-5 Q-1 Polymer A1 PAG-C Polymer C1 PGMEA EL (3.0) (80) (9) (3) (1,160) (2,706) Example 1-6 R-6 Q-1 Polymer A1 PAG-C Polymer C2 PGMEA EL (3.0) (80) (9) (3) (1,160) (2,706) Example 1-7 R-7 Q-1 Polymer A1 PAG-C Polymer C3 PGMEA EL (3.0) (80) (9) (3) (1,160) (2,706) Example 1-8 R-8 Q-1 Polymer A1 PAG-C PGMEA EL (3.8) (80) (18) (1,160) (2,706) Example 1-9 R-9 Q-1 Polymer A2 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-10 R-10 Q-1 Polymer A3 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-11 R-11 Q-2 Polymer A3 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-12 R-12 Q-1 Polymer A3 PAG-C Polymer C1 PGMEA EL (3.0) (80) (9) (3) (1,160) (2,706) Example 1-13 R-13 Q-1 Polymer A3 Polymer P1 PGMEA CyH (2.8) (40) (40) (1,160) (2,706) Example 1-14 R-14 Q-1 Polymer A3 Polymer P2 PGMEA EL PGME (2.8) (40) (40) (386) (1,932) (1,546) Example 1-15 R-15 Q-1 Polymer A3 Polymer P2 PGMEA EL PGME (2.8) (40) (40) (386) (1,932) (1,546) Example 1-16 R-16 Q-1 Polymer A3 Polymer P2 PAG-A PGMEA EL PGME (3.2) (40) (40) (5) (386) (1,932) (1,546) Example 1-17 R-17 Q-1 Polymer A3 Polymer P2 PAG-A Polymer C1 PGMEA EL PGME (3.2) (40) (40) (5) (3) (386) (1,932) (1,546) Example 1-18 R-18 Q-1 Polymer A3 Polymer P2 PAG-C Polymer C1 PGMEA EL PGME (3.2) (40) (40) (5) (3) (386) (1,932) (1,546) Example 1-19 R-19 Q-1 Polymer A4 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-20 R-20 Q-1 Polymer A4 Polymer P2 PGMEA EL PGME (2.8) (40) (40) (386) (1,932) (1,546) Example 1-21 R-21 Q-1 Polymer A4 Polymer P2 PAG-A PGMEA EL PGME (3.2) (40) (40) (5) (386) (1,932) (1,546) Example 1-22 R-22 Q-1 Polymer A4 Polymer P2 PAG-A Polymer C1 PGMEA EL PGME (3.2) (40) (40) (5) (3) (255) (1,640) (1,310) Example 1-23 R-23 Q-1 Polymer A4 Polymer P2 PAG-C Polymer C1 PGMEA EL PGME (3.2) (40) (40) (5) (3) (255) (1,640) (1,310) Example 1-24 R-24 Q-1 Polymer A5 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-25 R-25 Q-1 Polymer A5 PAG-C PGMEA EL (3.0) (80) (18) (1,160) (2,706) Example 1-26 R-26 Q-1 Polymer A6 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-27 R-27 Q-1 Polymer A6 PAG-C PGMEA EL (3.8) (80) (18) (1,160) (2,706) Example 1-28 R-28 Q-1 Polymer A7 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-29 R-29 Q-2 Polymer A7 PAG-C PGMEA EL (3.0) (80) (9) (1,160) (2,706) Example 1-30 R-30 Q-1 Polymer A7 PAG-C PGMEA EL (3.8) (80) (18) (1,160) (2,706) Example 1-31 R-31 Q-1 Polymer A7 Polymer P2 PGMEA EL PGME (2.8) (40) (40) (255) (1,640) (1,310) Example 1-32 R-32 Q-1 Polymer A7 Polymer P2 Polymer C1 PGMEA EL PGME (2.8) (40) (40) (3) (255) (1,640) (1,310) Example 1-33 R-33 Q-1 Polymer A7 Polymer P2 PAG-A PGMEA EL PGME (3.2) (40) (40) (5) (255) (1,640) (1,310) Example 1-34 R-34 Q-1 Polymer A7 Polymer P2 PAG-A Polymer C1 PGMEA EL PGME (3.2) (40) (40) (5) (3) (255) (1,640) (1,310) Example 1-35 R-35 Q-1 Polymer A7 Polymer P2 PAG-C Polymer C1 PGMEA EL PGME (3.2) (40) (40) (5) (3) (255) (1,640) (1,310) Comparative CR-1 Q-3 Polymer A1 PAG-A PGMEA EL Example 1-1 (4.0) (80) (9) (1,160) (2,706) Comparative CR-2 Q-4 Polymer A1 PAG-A PGMEA EL Example 1-2 (2.0) (80) (9) (1,160) (2,706) 4) EB Writing Test

Examples 2-1 to 2-35 and Comparative Examples 2-1 to 2-2

Using a coater/developer system ACT-M (Tokyo Electron Ltd.), each of the positive resist compositions (Examples and Comparative Examples) was spin coated onto a mask blank of 152 mm squares having the outermost surface of silicon oxide (vapor primed with hexamethyldisilazane (HMDS)) and prebaked on a hotplate at 110° C. for 600 seconds to form a resist film of 80 nm thick. The thickness of the resist film was measured by an optical film thickness measurement system Nanospec (Nanometrics Inc.). Measurement was made at 81 points in the plane of the blank substrate excluding a peripheral band extending 10 mm inward from the blank periphery, and an average film thickness and a film thickness range were computed therefrom.

The coated mask blanks were exposed to EB using an EB writer system EBM-5000Plus (NuFlare Technology Inc., accelerating voltage 50 kV), then baked (PEB) at 110° C. for 600 seconds, and developed in a 2.38 wt % tetramethylammonium hydroxide (TMAH) aqueous solution, thereby yielding positive patterns.

The patterned mask blank was observed under a top-down scanning electron microscope (TD-SEM). The optimum exposure (Eop) was defined as the exposure dose (μC/cm²) which provided a 1:1 resolution at the top and bottom of a 200-nm 1:1 line-and-space pattern. The maximum resolution of the resist was defined as the minimum line width of a line-and-space pattern that could be resolved at the optimum exposure. The LER of a 200-nm line-and-space pattern was measured under SEM. On observation in cross section of the resist pattern under SEM, it was visually judged whether or not the pattern profile was rectangular. The test results are shown in Table 2.

TABLE 2 Maximum Resist Eop, resolution, LER, Pattern composition μC/cm² nm nm profile Example 2-1 R-1 48 40 4.6 rectangular Example 2-2 R-2 50 40 4.8 rectangular Example 2-3 R-3 51 37 4.6 rectangular Example 2-4 R-4 51 45 4.9 rectangular Example 2-5 R-5 52 37 4.6 rectangular Example 2-6 R-6 50 40 4.8 rectangular Example 2-7 R-7 49 40 4.8 rectangular Example 2-8 R-8 48 37 4.5 rectangular Example 2-9 R-9 49 45 4.8 rectangular Example 2-10 R-10 50 37 4.6 rectangular Example 2-11 R-11 50 40 4.8 rectangular Example 2-12 R-12 49 37 4.5 rectangular Example 2-13 R-13 50 45 4.7 rectangular Example 2-14 R-14 51 40 4.7 rectangular Example 2-15 R-15 51 45 4.8 rectangular Example 2-16 R-16 50 37 4.7 rectangular Example 2-17 R-17 50 40 4.8 rectangular Example 2-18 R-18 50 40 4.7 rectangular Example 2-19 R-19 52 40 4.8 rectangular Example 2-20 R-20 51 45 4.8 rectangular Example 2-21 R-21 52 40 4.6 rectangular Example 2-22 R-22 52 40 4.7 rectangular Example 2-23 R-23 51 37 4.6 rectangular Example 2-24 R-24 52 40 4.8 rectangular Example 2-25 R-25 51 40 4.7 rectangular Example 2-26 R-26 51 37 4.6 rectangular Example 2-27 R-27 52 37 4.5 rectangular Example 2-28 R-28 52 37 4.6 rectangular Example 2-29 R-29 52 45 4.8 rectangular Example 2-30 R-30 51 37 4.4 rectangular Example 2-31 R-31 52 40 4.5 rectangular Example 2-32 R-32 50 40 4.6 rectangular Example 2-33 R-33 52 40 4.4 rectangular Example 2-34 R-34 51 40 4.4 rectangular Example 2-35 R-35 52 40 4.4 rectangular Comparative CR-1 49 60 5.6 inversely Example 2-1 tapered Comparative CR-2 50 60 5.8 inversely Example 2-2 tapered

As seen from the data in Table 2, the resist compositions R-1 to R-35 containing the sulfonium compound having formula (A) within the scope of the invention exhibit a high resolution, satisfactory pattern rectangularity, and acceptable values of LER. In contrast, the comparative resist compositions CR-1 to CR-2 are inferior in resolution and LER. This is because the acid generated upon exposure diffuses into the unexposed region to induce the unwanted reaction that a few protective groups on the base polymer in the unexposed region are deprotected.

The resist compositions containing the sulfonium compound having formula (A) within the scope of the invention have a higher acid trapping ability and are less susceptible to the undesired reaction than the resist composition of Comparative Example 2-1 containing the comparative acid diffusion inhibitor. After imagewise exposure, the sulfonium compound having formula (A) is converted to a weakly acidic phenolic compound, losing the acid diffusion regulating ability. Therefore the reaction contrast between exposed and unexposed regions is enhanced. Comparative Example 2-2 is low in reaction contrast because Compound Q-4 used therein retains the acid diffusion regulating ability even after imagewise exposure. As a result, a pattern having satisfactory resolution and reduced LER is formed from the resist composition within the scope of the invention. This suggests that even when the resist composition is applied to a processable substrate having an outermost surface made of a material to which the resist pattern profile is sensitive, such as chromium or silicon-containing material, a pattern with high resolution and reduced LER can be formed through high-energy radiation exposure because the inventive resist composition containing the specific sulfonium compound is efficient for controlling acid diffusion at the substrate interface.

5) EB Writing Test after Coating of Antistatic Film

Examples 3-1 to 3-7 and Comparative Examples 3-1 to 3-2

Using a coater/developer system Clean Track Mark 8 (Tokyo Electron Ltd.), each of the positive resist compositions (Examples and Comparative Examples) was spin coated onto a 6-inch silicon wafer (vapor primed with HMDS) and baked at 110° C. for 240 seconds to form a resist film of 80 nm thick. Using Clean Track Mark 8, a conductive polymer composition was dispensed dropwise and spin coated over the entire resist film and baked on a hotplate at 90° C. for 90 seconds to form an anti-charging film of 60 nm thick. The conductive polymer composition used herein was a water dispersion of polystyrene-doped polyaniline as described in Proc. of SPIE Vol. 8522 85220O-1.

The coated wafer was exposed to EB using an EB writer system HL-800D (Hitachi High-Technologies, Ltd., accelerating voltage 50 kV), rinsed with pure water for 15 seconds to strip off the anti-charging film, then baked (PEB) at 110° C. for 240 seconds, and developed in a 2.38 wt % TMAH aqueous solution for 80 seconds, thereby yielding a positive pattern.

The patterned mask blank was observed under a TD-SEM. The optimum exposure (Eop) was defined as the exposure dose (μC/cm²) which provided a 1:1 resolution at the top and bottom of a 400-nm 1:1 line-and-space pattern. The maximum resolution of the resist was defined as the minimum line width of a line-and-space pattern that could be resolved at the optimum exposure. The results are shown in Table 3.

TABLE 3 Resist Eop, Maximum composition μC/cm² resolution, nm Example 3-1 R-1 48 70 Example 3-2 R-3 48 70 Example 3-3 R-5 49 60 Example 3-4 R-29 50 70 Example 3-5 R-33 49 70 Example 3-6 R-34 48 60 Example 3-7 R-35 48 60 Comparative CR-1 47 80 Example 3-1 Comparative CR-2 47 90 Example 3-2

As seen from the data in Table 3, the resist compositions of Examples 3-1 to 3-7 containing the sulfonium compound having formula (A) as acid diffusion inhibitor within the scope of the invention exhibit a satisfactory resolution. In contrast, the resist compositions of Comparative Examples 3-1 and 3-2 are inferior in resolution. This is because the very weak acid in the anti-charging film induces the unwanted reaction to deprotect a few protective groups on the base polymer in the unexposed region. Since the resist composition containing the inventive sulfonium compound has a higher salt exchange efficiency than the resist composition of Comparative Example 3-1 containing the acid diffusion inhibitor Q-3 and reduced in intermixing between the resist layer and the anti-charging layer as compared with Comparative Example 3-2, the likelihood of the unwanted reaction is reduced. As a result, a pattern with a higher resolution can be formed. Examples 3-3, 3-6 and 3-7 reveal that resolution is further improved by adding fluorinated polymer (C) which is effective for suppressing acid mixing.

It has been demonstrated that using the resist composition within the scope of the invention, a pattern having a very high resolution and minimal LER can be formed via exposure and development. Even when the resist film is overlaid with an anti-charging film, the resist composition within the scope of the invention maintains a high resolution. The pattern forming process using the resist composition within the scope of the invention is advantageous in the photolithography for semiconductor device fabrication and photomask blank processing.

Japanese Patent Application No. 2016-255018 is incorporated herein by reference.

Although some preferred embodiments have been described, many modifications and variations may be made thereto in light of the above teachings. It is therefore to be understood that the invention may be practiced otherwise than as specifically described without departing from the scope of the appended claims. 

The invention claimed is:
 1. A positive resist composition comprising (A) a sulfonium compound having the formula (A) and (B) a base polymer containing a polymer comprising recurring units having the formula (B1), adapted to be decomposed under the action of acid to increase its solubility in alkaline developer,

wherein R¹, R², and R³ are each independently a C₁-C₂₀ straight, branched or cyclic monovalent hydrocarbon group which may contain a heteroatom, p and q are each independently an integer of 0 to 5, r is an integer of 0 to 4, in case of p=2 to 5, two adjoining groups R¹ may bond together to form a ring with the carbon atoms to which they are attached, in case of q=2 to 5, two adjoining groups R² may bond together to form a ring with the carbon atoms to which they are attached, in case of r=2 to 4, two adjoining groups R³ may bond together to form a ring with the carbon atoms to which they are attached,

wherein R^(A) is hydrogen, fluorine, methyl or trifluoromethyl, R¹¹ is each independently halogen, an optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₆ straight, branched or cyclic alkyl group, or optionally halogenated C₁-C₆ straight, branched or cyclic alkoxy group, A¹ is a single bond or C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, v is 0 or 1, w is an integer of 0 to 2, a is an integer satisfying 0≤a≤5+2w−b, and b is an integer of 1 to
 3. 2. The positive resist composition of claim 1 wherein the polymer further comprises recurring units having the formula (B2):

wherein R^(A) is as defined above, R¹² is each independently halogen, an optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₆ straight, branched or cyclic alkyl group, or optionally halogenated C₁-C₆ straight, branched or cyclic alkoxy group, A² is a single bond or C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, s is 0 or 1, t is an integer of 0 to 2, c is an integer satisfying: 0≤c≤5+2t−e, d is 0 or 1, e is an integer of 1 to 3, in case of e=1, X is an acid labile group, and in case of e=2 or 3, X is hydrogen or an acid labile group, at least one X being an acid labile group.
 3. The positive resist composition of claim 1 wherein the polymer further comprises recurring units of at least one type selected from units having the formulae (B3), (B4), and (B5):

wherein R^(A) is as defined above, R¹³ and R¹⁴ are each independently a hydroxyl group, halogen atom, acetoxy group, optionally halogenated C₂-C₈ straight, branched or cyclic acyloxy group, optionally halogenated C₁-C₈ straight, branched or cyclic alkyl group, optionally halogenated C₁-C₈ straight, branched or cyclic alkoxy group, or optionally halogenated C₂-C₈ straight, branched or cyclic alkylcarbonyloxy group, R¹⁵ is an acetyl group, acetoxy group, C₁-C₂₀ straight, branched or cyclic alkyl group, C₁-C₂₀ straight, branched or cyclic alkoxy group, C₂-C₂₀ straight, branched or cyclic acyloxy group, C₂-C₂₀ straight, branched or cyclic alkoxyalkyl group, C₂-C₂₀ alkylthioalkyl group, halogen atom, nitro group, cyano group, sulfinyl group, or sulfonyl group, A³ is a single bond or C₁-C₁₀ straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, f and g are each independently an integer of 0 to 4, b is 0 or 1, j is an integer of 0 to 5, and k is an integer of 0 to
 2. 4. The positive resist composition of claim 1 wherein the polymer further comprises recurring units of at least one type selected from units having the formulae (B6) to (B13):

wherein R^(B) is each independently hydrogen or methyl, Z¹ is a single bond, phenylene group, —O—Z¹²—, or —C(═O)—Z¹¹—Z¹²—, Z¹¹ is —O— or —NH—, Z¹² is a C₁-C₆ straight, branched or cyclic alkylene, C₂-C₆ straight, branched or cyclic alkenylene or phenylene group, which may contain a carbonyl, ester, ether or hydroxy moiety, Z² is a single bond or —Z²¹—C(═O)—O—, Z²¹ is a C₁-C₂₀ straight, branched or cyclic divalent hydrocarbon group which may contain a heteroatom-containing moiety, Z³ is a single bond, methylene, ethylene, phenylene, fluorinated phenylene, —O—Z³²—, or —C(═O)—Z³¹—Z³²—, Z³¹ is —O— or —NH—, Z³² is a C₁-C₆ straight, branched or cyclic alkylene, C₂-C₆ straight, branched or cyclic alkenylene or phenylene group, which may contain a carbonyl, ester, ether or hydroxy moiety, Z⁴ is a single bond or a C₁-C₃₀ straight, branched or cyclic divalent hydrocarbon group which may contain a heteroatom, u is 0 or 1, with the proviso that u is 0 when Z⁴ is a single bond, R²¹ to R³⁸ are each independently a C₁-C₂₀ straight, branched or cyclic monovalent hydrocarbon group which may contain a heteroatom-containing moiety, or R²¹ and R²² may bond together to form a ring with the sulfur atom to which they are attached, or any two of R²³, R²⁴ and R²⁵, any two of R²⁶, R²⁷ and R²⁸ or any two of R²⁹, R³⁰ and R³¹ may bond together to form a ring with the sulfur atom to which they are attached, A is hydrogen or trifluoromethyl, and M⁻ is a non-nucleophilic counter ion.
 5. The positive resist composition of claim 1, further comprising (C) a fluorinated polymer comprising recurring units having the formula (C1) and recurring units of at least one type selected from units having the formulae (C2), (C3), (C4), and (C5):

wherein R^(B) is each independently hydrogen or methyl, R^(C) is each independently hydrogen, fluorine, methyl or trifluoromethyl, R⁴¹ is hydrogen or a C₁-C₅ straight or branched monovalent hydrocarbon group in which a heteroatom may intervene in a carbon-carbon bond, R⁴² is a C₁-C₅ straight or branched monovalent hydrocarbon group in which a heteroatom may intervene in a carbon-carbon bond, R^(43a), R^(43b), R^(45a) and R^(45b) are each independently hydrogen or a C₁-C₁₀ straight, branched or cyclic alkyl group, R⁴⁴, R⁴⁶, R⁴⁷ and R⁴⁸ are each independently hydrogen, a C₁-C₁₅ straight, branched or cyclic monovalent hydrocarbon group or monovalent fluorinated hydrocarbon group, or an acid labile group, with the proviso that an ether or carbonyl moiety may intervene in a carbon-carbon bond in the monovalent hydrocarbon groups or monovalent fluorinated hydrocarbon groups represented by R⁴⁴, R⁴⁶, R⁴⁷ and R⁴⁸, x is an integer of 1 to 3, y is an integer satisfying: 0≤y≤5+2z−x, z is 0 or 1, m is an integer of 1 to 3, X¹ is a single bond, —C(═O)—O— or —C(═O)—NH—, and X² is a C₁-C₂₀ straight, branched or cyclic (m+1)-valent hydrocarbon group or fluorinated hydrocarbon group.
 6. The positive resist composition of claim 1, further comprising (D) an organic solvent.
 7. The positive resist composition of claim 1, further comprising (E) a photoacid generator.
 8. A resist pattern forming process comprising the steps of: applying the positive resist composition of claim 1 onto a processable substrate to form a resist film thereon, exposing the resist film patternwise to high-energy radiation, and developing the resist film in an alkaline developer to form a resist pattern.
 9. The process of claim 8 wherein the high-energy radiation is EUV or EB.
 10. The process of claim 8 wherein the processable substrate has an outermost surface of silicon-containing material.
 11. The process of claim 8 wherein the processable substrate is a photomask blank.
 12. A photomask blank having coated thereon the positive resist composition of claim
 1. 